Contact structure production method

A method of producing a contact structure for establishing electrical connection with contact targets. The contact structure is formed of a contactor carrier and a plurality of contactors. The contactor has an upper end oriented in a vertical direction, a straight beam portion oriented in a direction opposite to the upper end and having a lower end which functions as a contact point for electrical connection with a contact target, a return portion returned from the lower end and running in parallel with the straight beam portion to create a predetermined gap therebetween, a diagonal beam portion provided between the upper end and the straight beam portion to function as a spring.

What is claimed is:

1. A method for producing a contact structure, comprising the following steps of:

(a) forming a sacrificial layer on a surface of a base substrate;

(b) forming a photoresist layer on the sacrificial layer;

(c) aligning a photo mask over the photoresist layer and exposing the photoresist layer through the photo mask, the photo mask including an image of contactors;

(d) developing patterns of the image of the contactors on a surface of the photoresist layer;

(e) forming the contactors made of conductive material in the patterns on the photoresist layer by depositing the conductive material; each of the contactors having an upper end, a straight beam portion with a lower end as a contact point, a return portion to create a predetermined gap with the straight beam portion, and a diagonal beam portion provided between the upper end and the straight beam portion to function as a spring;

(f) stripping the photoresist layer off;

(g) removing the sacrificial layer so that the contactors are separated from the silicon substrate; and

(h) mounting the contactors on a contactor carrier having through holes to receive the contactors therein.

2. A method for producing a contact structure as defined in claim 1, after forming the contactors by depositing the conductive material, the method further comprising a step of placing an adhesive tape on the contactors so that upper surfaces of the contactors are attached to the adhesive tape.

3. A method for producing a contact structure as defined in claim 2, said step of mounting the contactors on the contactor carrier including a step of picking the contactor from the adhesive tape and changing orientation of the contactor and placing the contactor on the contactor carrier with use of a pick and place mechanism which utilizes a suction force to attract the contactor.

4. A method for producing a contact structure, comprising the following steps of:

(a) forming an conductive substrate made of electric conductive material on a base substrate;

(b) forming a photoresist layer on the conductive substrate;

(c) aligning a photo mask over the photoresist layer and exposing the photoresist layer through the photo mask, the photo mask including an image of contactors;

(d) developing patterns of the image of the contactors on a surface of the photoresist layer;

(e) forming the contactors made of conductive material in the patterns on the photoresist layer by depositing the conductive material, wherein each of the contactors having an upper end, a straight beam portion with a lower end as a contact point, a return portion to create a predetermined gap with the straight beam portion, and a diagonal beam portion provided between the upper end and the straight beam portion to function as a spring;

(f) stripping off the photoresist layer;

(g) peeling the conductive substrate having contactors thereon from the dielectric substrate;

(h) placing an adhesive tape on the contactors on the conductive substrate so that upper surfaces of the contactors adhere to the adhesive tape wherein adhesive strength between the contactors and the adhesive tape is larger than that between the contactors and the conductive substrate;

(i) peeling the conductive substrate so that the contactors on the adhesive tape are separated from the conductive substrate; and

(j) mounting the contactor on a contactor carrier having a through hole.

5. A method for producing a contact structure as defined in claim 1, wherein said step of exposing the photoresist layer includes a step of exposing the photoresist layer by ultraviolet light, laser light, an electron beam, or X-rays.

6. A method for producing a contact structure as defined in claim 1, wherein said steps of exposing the photoresist layer and developing the patterns include a step of applying an electron beam, X-ray, or laser light to form the patterns of the image of the contactors on the photoresist layer.

7. A method for producing a contact structure as defined in claim 1, further including a step of forming a seed layer made of electric conductive material on the sacrificial layer for depositing the conductive material through an electroplating process, and a step of forming an adhesion promoter layer between the sacrificial layer and the conductive layer.

8. A method for producing a contact structure as defined in claim 7, wherein the electric conductive material for the seed layer is different from the electric conductive material for the contactors.

9. A method for producing a contact structure as defined in claim 4, said step of mounting the contactors on the contactor carrier including a step of picking the contactor from the adhesive tape and changing orientation of the contactor and placing the contactor on the contactor carrier with use of a pick and place mechanism which utilizes a suction force to attract the contactor.

10. A method for producing a contact structure as defined in claim 4, wherein said step of exposing the photoresist layer includes a step of exposing the photoresist layer by ultraviolet light, laser light, an electron beam, or X-rays.

11. A method for producing a contact structure as defined in claim 4, wherein said steps of exposing the photoresist layer and developing the patterns include a step of applying an electron beam, X-ray, or laser light to form the patterns of the image of the contactors on the photoresist layer.

12. A method for producing a contact structure as defined in claim 4, further including a step of forming a seed layer made of electric conductive material on the sacrificial layer for depositing the conductive material through an electroplating process, and a step of forming an adhesion promoter layer between the sacrificial layer and the conductive layer.

13. A method for producing a contact structure as defined in claim 12, wherein the electric conductive material for the seed layer is different from the electric conductive material for the contactors.

14. A method for producing a contact structure as defined in claim 4, wherein the conductive substrate and the contactors are made of nickel-cobalt (NiCo).

15. A method for producing a contact structure as defined in claim 4, further comprising a step of forming a chrome-inconel layer on the dielectric substrate where the conductive substrate is created on the chrome-inconel layer.