Sintered silicon nitride products

by: Mizuno, Kenichi; Tajima, Yo; Watanabe, Masakazu;

A sintered silicon nitride product comprises from 72 to 98% by weight of silicon nitride, from 1 to 8% by weight of vanadium pentoxide, and from 1 to 20% by weight of one or more oxides of rare earth elements. The vanadium pentoxide and the oxide of rare earth elements accelerate the densification of the sintered product, and provide high strength at high temperature as well as excellent oxidation resistance to the sintered product.

BACKGROUND OF THE INVENTION

This invention relates to sintered silicon nitride products having high strength at high temperatures and excellent oxidation resistance.

Sintered silicon nitride products have excellent properties such as mechanical strength, heat and corrosion resistance, etc., and they are used as high temperature structural materials, such as for parts of automotive engines, gas turbines, etc., which require heat resistance and oxidation resistance.

Silicon nitride has a poor sinterability because of its strong covalent bond. Therefore, sintered silicon nitride products have been fabricated by using sintering aids such as magnesium oxide (MgO), aluminum oxide (Al.sub.2 O.sub.3), zirconium dioxide (ZrO.sub.2), oxide of rare earth elements, etc..

However, when the metallic oxides such as MgO, Al.sub.2 O.sub.3, and/or ZrO.sub.2 is used as sintering aids, low-melting point glass phase is formed as a grain boundary phase, resulting in degradation of strength at high temperatures and inferior oxidation resistance.

When the oxides of any rare earth elements are used as sintering aid, hot-pressing process is required to obtain dense sintered products, because these sintering aids are less effective in densification than other sintering aids.

The nature and functioning of sintering aids to be added in fabricating sintered products have been extensively studied, and a sintering aid excellent in sinterability has been developed.

SUMMARY OF THE INVENTION

The object of this invention is to provide sintered silicon nitride products having high mechanical strength at high temperatures and excellent oxidation resistance.

This object is attained by a sintered silicon nitride product comprising from 72% to 98% by weight of silicon nitride (Si.sub.3 N.sub.4), from 1% to 8% by weight of vanadium (V) element calculated as vanadium pentoxide (V.sub.2 O.sub.5), and from 1% to 20% by weight of one or more oxides of rare earth elements.

As a sintering aid, from 1% to 20% by weight of the oxide of rare earth elements is added. Less than 1% by weight of the oxide of rare earth elements cannot provide its aiding effect. On the other hand, when the oxide of rare earth elements exceeds 20% by weight, the mechanical strength of the resulting sintered products is deteriorated. When the amount of the oxide of rare earth elements is further increased, the increasing amount of melilite type compound (R.sub.2 Si.sub.3 O.sub.3 N.sub.4, R:rare earth element) harmful to the oxidation at medium temperatures from 700.degree. C. to 1000.degree. C. tends to be formed. The resulting sintered products thus exhibit an insufficient oxidation resistance. Consequently, from 1% to 15% by weight of the oxide of rare earth elements is best.

For V element, its oxide is an effective sintering aid. By using this sintering aid, the sintered products with high density can be easily obtained by gas pressure sintering process and processes other than a hot-pressing process, through which a product having a complicated shape is difficult to sinter. By adding the oxide of V element, oxygen is released in the sintered products, R.sub.2 Si.sub.3 O.sub.3 N.sub.4 is prevented from generating, and vanadium silicide (VSi.sub.2), vanadium trisilicide (V.sub.5 Si.sub.3), and/or other silicide as generated in the grain boundary. The melting points of these silicides are 1600.degree. C. or higher. Consequently, the sintered products with the silicides are generated in the grain boundary can maintain strength at high temperatures. Since the silicide is uniformly dispersed in the grain boundary, Si.sub.3 N.sub.4 powder is inhibited from growing, thereby enhancing the mechanical strength of the sintered products.

Less than 1% by weight of V.sub.2 O.sub.5 cannot provide its aiding effect or inhibit the melilite compound from generating. When V.sub.2 O.sub.5 exceeds 8% by weight, vanadium silicides are formed excessively so that they disperse nonuniformly and cohere to each other in the grain boundary. The strength of the sintered products at room temperature and high temperatures is deteriorated accordingly.

BRIEF DESCRIPTION OF THE DRAWING

FIG. 1A shows back scattered electron image of a sintered product for a fourth embodiment of this invention.

FIG. 1B shows back scattered electron image of a sintered product as a reference test sample for the fourth embodiment.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

EMBODIMENT 1

Si.sub.3 N.sub.4 powder in the .alpha.-phase having an average particle size of 0.7 micron was blended with yttrium oxide powder (Y.sub.2 O.sub.3) having an average particle size of two microns and V.sub.2 O.sub.5 having an average particle size of one micron or Al.sub.2 O.sub.3 having an average particle size of one micron so as to obtain sample compositions 1-4 as shown in Table 1. After mixing by a ball mill and dying, the mixture was sintered under a pressure of 200 kg/cm.sup.2 and for one hour at 1800.degree. C. by a hot-pressing process. The properties of resulting sintered products of 35x35x5mm were measured as follows. The results are shown in Table 1.

The flexural strength at three points on the test samples was measured at a room temperature and 1300.degree. C. according to JIS R-1601 and JIS R-1604.

The oxidation test was carried out at 1,000.degree. C. and 1,350.degree. C., respectively, for 100 hours in air. Weight gain of test samples of 3x4x35mm after oxidation test was measured.

As shown in Table 1, the test samples No. 1 and 2 for this embodiment resulting from the hot-pressing process have excellent properties: a strength equal to or higher than 90 kg/mm.sup.2 at 1,300.degree. C., and a weight gain less than 0.1 mg/cm.sup.2 after oxidation at 1,000.degree. C. and 1,350.degree. C.

On the other hand, Al.sub.2 O.sub.3 is added to a reference test sample No.3, and low-melting point glass phase is generated in the grain boundary. The strength of the reference test sample No.3 at the room temperature deteriorates at 1,300.degree. C. Only Y.sub.2 O.sub.3 is added to a reference test sample No.4, and melilite phase is generated. The reference test sample No.4 gains much weight after oxidation at 1,000.degree. C. and its oxidation resistance becomes inferior.

                                      TABLE 1
    __________________________________________________________________________
    Properties of Sintered Products through Hot-pressing Process
                             FLEXURAL  WEIGHT GAIN
                             STRENGTH  AFTER
                COMPOSITION  (kg/mm.sup.2)
                                       OXIDATION
    SAMPLE      (% BY WEIGHT)
                             ROOM      (mg/cm.sup.2)
    NO.         Si.sub.3 N.sub.4
                    Y.sub.2 O.sub.3
                       OTHERS
                             TEMP.
                                  1300.degree. C.
                                       1000.degree. C.
                                            1350.degree. C.
    __________________________________________________________________________
    EMBOD.
          1     94  4  V.sub.2 O.sub.5
                           2 103  97   0.02 0.06
          2     90  6  V.sub.2 O.sub.5
                           4 107  91   0.06 0.08
    REFER.
          3     94  4  Al.sub.2 O.sub.3
                           2 105  42   0.13 0.81
          4     94  6   --   101  96   0.25 0.09
    __________________________________________________________________________


EMBODIMENT 2

In the same way as the first embodiment, Si.sub.3 N.sub.4 powder in the .alpha.-phase was blended with V.sub.2 O.sub.5 having an average particle size of one micron. An oxide of rare earth elements with a purity of 99.9% was also blended so as to obtain sample compositions as shown in Table 2. After drying, the mixture powder was molded under a hydrostatic pressure of 2 ton/cm.sup.2 to obtain a product of 10x10x50mm and was sintered in nitrogen gas under a pressure of five atm at 1900.degree. C. for two hours. The relative densities of the resulting sintered products are shown in Table 2.

As shown in Table 2, V.sub.2 O.sub.5 in the range specified in this invention enhances the sinterability. The test samples No.5 through No.9 for this embodiment have relative densities exceeding 98%.

On the other hand, reference test samples No.10 through No.13 contain less than 1% by weight of V.sub.2 O.sub.5 or less than 1% by weight of the oxide of rare earth elements. These sintering aids can exhibit no sintering effect due to their small amount. The reference test samples No.10 through No.13 have low relative densities between 80% and 85%, and opened pores remain in the reference test samples.

                                      TABLE 2
    __________________________________________________________________________
    Sinterability of Gas-pressure Sintering
                   COMPOSITION
                   (% BY WEIGHT)
             SAMPLE    OXIDE OF RARE   RELATIVE
             NO.   Si.sub.3 N.sub.4
                       EARTH ELEMENTS
                                   V.sub.2 O.sub.5
                                       DENSITY (%)
    __________________________________________________________________________
    EMBODIMENT
             5     94    Y.sub.2 O.sub.3
                             4     2   98.8
             6     90    Y.sub.2 O.sub.3
                             6     4   99.2
             7     90    Er.sub.2 O.sub.3
                             9     1   98.4
             8     79    Er.sub.2 O.sub.3
                             15    6   99.5
             9     94    Sc.sub.2 O.sub.3
                             2     4   98.6
    REFERENCE
             10    90    Y.sub.2 O.sub.3
                             10    --  83.4
             11    94    Y.sub.2 O.sub.3
                             6     --  81.2
             12    93.5  Y.sub.2 O.sub.3
                             6     0.5 85.4
             13    93.5  Y.sub.2 O.sub.3
                             0.5   6   79.6
    __________________________________________________________________________









EMBODIMENT 3

In the same way as the second embodiment, Si.sub.3 N.sub.4 powder in the .alpha.-phase was blended with V.sub.2 O.sub.5 having an average particle size of one micron and the oxide of rare earth elements with a purity of 99.9% so as to obtain sample compositions as shown in Table 3. After drying, the mixture powder was molded under a hydrostatic pressure of 2 ton/cm.sup.2 to obtain a product of 50x50x10mm, and was first sintered in a nitrogen gas under a pressure of two atm at 1800.degree. C. for two hours. The sintered product was resintered in a nitrogen gas under a pressure of 100 atm at 1800.degree. C. for two hours.

The properties of the resulting sintered product were measured as follows. The results are shown in Table 3.

The flexural strength at three points on the test samples was measured at the room temperature and 1350.degree. C. according to JIS R-1601 and JIS R-1604.

The oxidation test was carried out at 1,000.degree. C. and 1,350.degree. C., respectively, for 100 hours in air. Weight gain of test samples of 3x4x35mm after oxidation test was calculated.

As shown in Table 3, test samples No.14 through No.22 resulting from the two-step gas-pressure sintering process have excellent properties: a strength higher than 70 kg/mm.sup.2 at 1,300.degree. C., and a weight gain less than 0.2 mg/cm.sup.2 after oxidation at 1,000.degree. C. and 1,350.degree. C. In this way, the strength deterioration when the room temperature rises to 1,300.degree. C. is small. The weight gain after oxidation is also small.

On the other hand, reference test samples No.23 through No.25 contain less than 1% by weight of V.sub.2 O.sub.5 or less than 1% by weight of the oxide of rare earth elements. These sintering aids exhibit no sintering effect due to their small amount. The reference test samples are thus prevented from densification, their strength is low, and their oxidation resistance is inferior. The reference test sample No.26, which comprises 10% by weight of V.sub.2 O.sub.5 exceeding the range specified for this invention, has low strength at the room temperature and 1,300.degree. C. due to excess vanadium silicide. The reference test sample No.27 contains much oxide of rare earth elements and melilite type compound is generated, thus deteriorating its resistance to oxidation at 1,000.degree. C. and its strength at the room temperature and high temperatures.

                                      TABLE 3
    __________________________________________________________________________
    Properties of Gas-pressure Sintered Products
                   COMPOSITION
                   (% BY WEIGHT)               FLEXURAL  WEIGHT GAIN
                          OXIDE OF             STRENGTH  AFTER
                          RARE          RELATIVE
                                               (kg/mm.sup.2)
                                                         OXIDATION
             SAMPLE       EARTH         DENSITY
                                               ROOM      (mg/cm.sup.2)
             NO.   Si.sub.3 N.sub.4
                          ELEMENTS V.sub.2 O.sub.5
                                        (%)    TEMP.
                                                    1300.degree. C.
                                                         1000.degree.
                                                              1350.degree.
    __________________________________________________________________________
                                                              C.
    EMBODIMENT
             14    94     Y.sub.2 O.sub.3
                               4   2    100    92   88   0.05 0.09
             15    92      .uparw.
                               .uparw.
                                   4    .uparw.
                                               90   84   0.05 0.10
             16    90      .uparw.
                               .uparw.
                                   6    .uparw.
                                               86   79   0.04 0.10
             17    90     Er.sub.2 O.sub.3
                               9   1    .uparw.
                                               95   86   0.09 0.11
             18    79     Er.sub.2 O.sub.3
                               15  6    .uparw.
                                               83   74   0.11 0.13
             19    84     Yb.sub.2 O.sub.3
                               8   8    .uparw.
                                               81   70   0.08 0.11
                           Sc.sub.2 O.sub.3
                                1
             20    94              4    .uparw.
                                               88   76   0.01 0.06
                          Y.sub.2 O.sub.3
                               1
                           Y.sub.2 O.sub.3
                                2
             21    94              2    .uparw.
                                               96   89   0.04 0.07
                          Er.sub.2 O.sub.3
                               2
                           Er.sub.2 O.sub.3
                                8
             22    81              3    .uparw.
                                               87   81   0.12 0.15
                          Yb.sub.2 O.sub.3
                               8
    REFERENCE
             23    94     Y.sub.2 O.sub.3
                               6   --   89     59   55   0.34 0.24
             24    93.5    .uparw.
                               .uparw.
                                   0.5  92     62   56   0.22 0.28
             25    93.5   Y.sub.2 O.sub.3
                               0.5 6    84     65   48   0.18 0.33
             26    86     Y.sub.2 O.sub.3
                               4   10   98     77   54   0.13 0.19
             27    76     Y.sub.2 O.sub.3
                               22  2    100    74   52   1.42 0.55
    __________________________________________________________________________


EMBODIMENT 4

Material powders the same as those used for the first embodiment and chromium oxide (Cr.sub.2 O.sub.3) are used. Specifically, Si.sub.3 N.sub.4 powder in the .alpha.-phase was blended with Y.sub.2 O.sub.3 powder having an average particle size of two microns, V.sub.2 O.sub.5 having an average particle size of one micron or Cr.sub.2 O.sub.3 having an average particle size of one micron so as to obtain sample compositions as shown in Table 4. After drying, the mixture was molded under a hydrostatic pressure of 2 ton/cm.sup.2 to obtain a product of 10x10x50mm and sintered in nitrogen gas under a pressure of ten atm at 1850.degree. C. for four hours.

The cross section of the sintered products resulting from gas-pressure sintering was polished and observed using a scanning electron microscope (SEM). Compositions shown in FIGS. 1A and 1B were observed. Properties were measured. The results are shown in Table 4.

                                      TABLE 4
    __________________________________________________________________________
                                     FLEXURAL
                                     STRENGTH AT
                 COMPOSITION  RELATIVE
                                     ROOM
           SAMPLE
                 (% BY WEIGHT)
                              DENSITY
                                     TEMPERATURE
    EXAMPLE
           NO.   Si.sub.3 N.sub.4
                     Y.sub.2 O.sub.3
                        OTHERS
                              (%)    (kg/mm.sup.2)
    __________________________________________________________________________
    EMBODI.
           28    94  4  V.sub.2 O.sub.5
                            2 99.5   90
    REFER. 29    94  4  Cr.sub.2 O.sub.3
                            2 98.2   81
    __________________________________________________________________________


In FIGS. 1A and 1B, luminescent spots are vanadium silicide and chromium silicide, dark columnar grains are Si.sub.3 N.sub.4, and white regions surrounding the grains are the grain boundary of yttrium compound. As shown in FIG. 1A, in the test sample No.28 for this embodiment, vanadium silicide grains having an average particle size of less than one micron are uniformly dispersed, and grain growth of Si.sub.3 N.sub.4 grains is inhibited.

On the other hand, as shown in FIG. 1B, in the reference test sample No.29, chromium silicide and Si.sub.3 N.sub.4 grains grow remarkably. As shown in Table 4, the reference test sample No.29 has lower strength at the room temperature, as compared with the test sample No.28.

Consequently, the sintering aid of V.sub.2 O.sub.5 inhibits the grain growth of Si.sub.3 N.sub.4 grains and enhances the mechanical strength of the sintered products.

While the invention has been described in detail and with reference to specific embodiments thereof, it will be apparent to one skilled in the art that various changes and modifications can be made therein without departing from the spirit and scope thereof.

Thin layer ablation apparatus

Fishing hooking device

Non-aqueous electrochemical cell

Drum construction

Incontinence electrode apparatus

Golf putt training apparatus

Simultaneous production of higher chloromethanes

Pest bait station

Multiple pouch bagging apparatus

Tricyclic amides

Wearable display

Snap fastening device

Display hook system

Light distribution device

Dual chamber water filter

Gravity particle separator

Powder dividing device for camera

Power converter device

Outdoor enclosure with heated desiccant

Variable delivery compressor

Photographic film and film cassette

Flash memory device

Fuel system

Passive lavatory cleanser dispensing system

High temperature diesel deposit tester

Depth-resolved fluorescence instrument

Workpiece feeding-ejection mechanism

Dispenser

Device in clearing saws

Modular station platform construction kit

Compartmentalized basket truck

Tissue anchoring system and method

Plain bearing

Naso-gastric tube retainer

Wheelchair motorizing apparatus

Extrusion machine

Facsimile compression for transmission

Fast circuit switching system

Vertical storage toolbox

Heterocyclic-methylene-penems

Motor control system

Isothiazole and isoxazole sulphoxides

Automated nut-cracking apparatus and method

Facial sun block mask

Lime sludge press unit

Pharmaceutically active morpholinol

Door clip

Output regulator

Endoscope signal level control

Clear impact-resistant syndiotactic polypropylene

Pulse width modulation operation circuit

Variable delay memory system

Cervical traction device

Environmentally stable monolithic Mach-Zehnder device

Power-generating control apparatus for vehicle

Shot gun shell tracer wad

Catalyzed fluorination of chlorocarbons

Digital character display

Portable foldable splint

Electronic voting machine

Liquid container

Motor vehicle gearbox

Sulfonium salt compounds

Method for preparing microemulsions

Oxide-superconduction grain boundary tunneling device

Somatostatin receptors

Electromechanical toy

X-ray lens

Method of preparing ferroelectric ceramics

Solar thermal propulsion unit

Lithography process

Decoupled integrated circuit package

DNA sequence encoding N-acetyl-galactosamine-transferase

Thermosensitive recording sheet

Fluid flow reversing apparatus

Golf club stand device

Drain-extended MOS ESD protection structure

Intraocular lens

Stacker bundler shuttle system

Polishing apparatus

Triarylpropyl-azabicyclooctanes

Security and deployment assembly

Layered film and packaging material

Splash guard

Floating inlet tube

Start-up circuit for voltage regulators

Front vehicle body structure

Impact-resisting composites

Developing unit for electro-photographic apparatus

Oscillator circuit

Hollow fiber separatory device

Brake pressure control valve

Laterally supported flexible sign

Hard surface detergent composition

Preparation of star polymers

Three dimensional space viewing device

Screw

Process for concentrating fluids

Glass compositions

Catalyst patterning for nanowire devices

Selective hydrogenation of olefins

Surface modifier composition

Actuator and actuator system

Collapsible wheelbarrow

Low-noise frequency synthesizer

Sod cutter

Developer powder supply cartridge

Window sash

Method of fabricating electronic circuits

Insulating insert for magnetic valves

Cover connecting mechanism

Aerobic exercise device

Manual floor sweeper

Valve timing adjusting device

Nitrogen detection