Radiant plunger ink jet printer
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Silverbrook, Kia; |
This patent describes an ink jet printer which uses an electro-mechanical activation process for the ejection of ink. A plunger is constructed from soft magnetic material and positioned between the nozzle chamber and an ink chamber. An electric coil is located adjacent to the plunger and electrically connected to a nozzle activation signal wherein upon activation of the activation signal, the plunger is caused by the coil to move thereby causing the ejection of ink. The electric coil is located within a cavity defined by the plunger. The plunger has a series of fluid release slots allowing for the expulsion of fluid under pressure in the cavity. A torsional spring is also provided for assisting in the return of the plunger.
STATEMENT REGARDING FEDERALLY SPONSORED RESEARCH OR DEVELOPMENT
Not applicable.
FIELD OF THE INVENTION
The present invention relates to ink jet printing and in particular discloses a radiant plunger ink jet printer.
The present invention further relates to the field of drop on demand ink jet printing.
BACKGROUND OF THE INVENTION
Many different types of printing have been invented, a large number of which are presently in use. The known forms of print have a variety of methods for marking the print media with a relevant marking media. Commonly used forms of printing include offset printing, laser printing and copying devices, dot matrix type impact printers, thermal paper printers, film recorders, thermal wax printers, dye sublimation printers and ink jet printers both of the drop on demand and continuous flow type. Each type of printer has its own advantages and problems when considering cost, speed, quality, reliability, simplicity of construction and operation etc.
In recent years, the field of ink jet printing, wherein each individual pixel of ink is derived from one or more ink nozzles has become increasingly popular primarily due to its inexpensive and versatile nature.
Many different techniques on ink jet printing have been invented. For a survey of the field, reference is made to an article by J Moore, "Non-Impact Printing: Introduction and Historical Perspective", Output Hard Copy Devices, Editors R Dubeck and S Sherr, pages 207 to 220 (1988).
Ink Jet printers themselves come in many different types. The utilization of a continuous stream ink in ink jet printing appears to date back to at least 1929 wherein U.S. Pat. No. 1,941,001 by Hansell discloses a simple form of continuous stream electrostatic ink jet printing.
U.S. Pat. No. 3,596,275 by Sweet also discloses a process of a continuous ink jet printing including the step wherein the ink jet stream is modulated by a high frequency electrostatic field so as to cause drop separation. This technique is still utilized by several manufacturers including Elmjet and Scitex (see also U.S. Pat. No. 3,373,437 by Sweet et al)
Piezoelectric ink jet printers are also one form of commonly utilized ink jet printing device. Piezoelectric systems are disclosed by Kyser et. al. in U.S. Pat. No. 3,946,398 (1970) which utilizes a diaphragm mode of operation, by Zolten in U.S. Pat. No. 3,683,212 (1970) which discloses a squeeze mode of operation of a piezoelectric crystal, Stemme in U.S. Pat. No. 3,747,120 (1972) discloses a bend mode of piezoelectric operation, Howkins in U.S. Pat. No. 4,459,601 discloses a piezoelectric push mode actuation of the ink jet stream and Fischbeck in U.S. 4,584,590 which discloses a sheer mode type of piezoelectric transducer element.
Recently, thermal ink jet printing has become an extremely popular form of ink jet printing. The ink jet printing techniques include those disclosed by Endo et al in GB 2007162 (1979) and Vaught et al in U.S. Pat. No. 4,490,728. Both the aforementioned references disclosed ink jet printing techniques rely upon the activation of an electrothermal actuator which results in the creation of a bubble in a constricted space, such as a nozzle, which thereby causes the ejection of ink from an aperture connected to the confined space onto a relevant print media. Printing devices utilizing the electro-thermal actuator are manufactured by manufacturers such as Canon and Hewlett Packard.
As can be seen from the foregoing, many different types of printing technologies are available. Ideally, a printing technology should have a number of desirable attributes. These include inexpensive construction and operation, high speed operation, safe and continuous long term operation etc. Each technology may have its own advantages and disadvantages in the areas of cost, speed, quality, reliability, power usage, simplicity of construction operation, durability and consumables.
SUMMARY OF THE INVENTION
It is an object of the present invention to provide an alternative form of ink jet printing which relies upon an electromechanical activation process for the ejection of ink.
In accordance with a first aspect there is provided an ink jet printing nozzle comprising a nozzle chamber having an ink ejection port at one end; a plunger constructed from soft magnetic material and positioned between the nozzle chamber and an ink chamber, which allows for the supply of ink to the nozzle chamber, and an electric coil located adjacent to the plunger and electrically connected to a nozzle activation signal wherein upon activation the plunger is caused to move from an ink loaded position to an ink ejection position and thereby causes the ejection of ink from the ink chamber through the ejection port. Further, the ink ejection nozzle comprises an armature plate constructed from soft magnetic material and the plunger is attracted to the armature plate on the activation of the coil. A cavity is defined by the plunger in which the electric coil is located, which has its dimensions reduced as a result of movement of the plunger, the plunger further having a series of fluid release slots in fluid communication with the cavity and the ink chamber, allowing for the expulsion of fluid under pressure in the formed cavity. Preferably, the ink jet printing nozzle comprises a resilient means for assisting in the return of the plunger from the ink ejection position to the ink loaded position after the ejection of ink from the ink ejection port. Advantageously, the resilient means comprises a torsional spring of an arcuate construction having a circumferential profile substantially the same as that of the plunger.
In accordance with a second aspect of the present invention, there is provided an ink jet printing nozzle constructed in accordance with the first aspect of the invention wherein the plunger has along one surface a series of slots. This surface forms the inner radial surface defining the cavity between the plunger and the electric coil. Further, the plunger has no fluid release slots in its top surface that defines the top wall of the cavity formed. Upon reduction of the cavity dimensions due to the downward movement of the plunger, induced by the electric coil, an ink flow through the slots into the nozzle chamber occurs assisting in the ejection of ink from the ink ejection port. Preferably, the slots have a substantially constant cross-sectional profile.
BRIEF DESCRIPTION OF THE DRAWINGS
Notwithstanding any other forms which may fall within the scope of the present invention, preferred forms of the invention will now be described, by way of example only, with reference to the accompanying drawings in which:
FIG. 1 is an exploded perspective view illustrating the construction of a single ink jet nozzle in accordance with the preferred embodiment of the present invention;
FIG. 2 is a timing diagram illustrating the operation of the preferred embodiment;
FIG. 3 is a cross-sectional top view of a single ink nozzle constructed in accordance with the preferred embodiment of the present invention;
FIG. 4 provides a legend of the materials indicated in FIGS. 5 to 21; and
FIG. 5 to FIG. 21 illustrate sectional views of the manufacturing steps in one form of construction of an ink jet printhead nozzle.
DESCRIPTION OF PREFERRED AND OTHER EMBODIMENTS
In FIG. 1, there is illustrated an exploded perspective view illustrating the construction of a single ink jet nozzle 4 in accordance with the principles of the present invention.
The nozzle 4 operates on the principle of electromechanical energy conversion and comprises a solenoid 11 which is connected electrically at a first end 12 to a magnetic plate 13 which is in turn connected to a current source eg. 14 utilised to activate the ink nozzle 4. The magnetic plate 13 can be constructed from electrically conductive iron.
A second magnetic plunger 15 is also provided, again being constructed from soft magnetic iron. Upon energising the solenoid 11, the plunger 15 is attracted to the fixed magnetic plate 13. The plunger thereby pushes against the ink within the nozzle 4 creating a high pressure zone in the nozzle chamber 17. This causes a movement of the ink in the nozzle chamber 17 and in a first design, subsequent ejection of an ink drop. A series of apertures eg. 20 is provided so that ink in the region of solenoid 11 is squirted out of the holes 20 in the top of the plunger 15 as it moves towards lower plate 13. This prevents ink trapped in the area of solenoid 11 from increasing the pressure on the plunger 15 and thereby increasing the magnetic forces needed to move the plunger 15.
Referring now to FIG. 2, there is illustrated a timing diagram 30 of the plunger current control signal. Initially, a solenoid current pulse 31 is activated for the movement of the plunger and ejection of a drop from the ink nozzle. After approximately 2 micro-seconds, the current to the solenoid is turned off. At the same time or at a slightly later time, a reverse current pulse 32 is applied having approximately half the magnitude of the forward current. As the plunger has a residual magnetism, the reverse current pulse 32 causes the plunger to move backwards towards its original position. A series of torsional springs 22, 23 (FIG. 1) also assists in the return of the plunger to its original position. The reverse current pulse 32 is turned off before the magnetism of the plunger 15 is reversed which would otherwise result in the plunger being attracted to the fixed plate 13 again. Returning to FIG. 1, the forced return of the plunger 15 to its quiescent position results in a low pressure in the chamber 17. This can cause ink to begin flowing from the outlet nozzle 24 inwards and also ingests air to the chamber 17. The forward velocity of the drop and the backward velocity of the ink in the chamber 17 are resolved by the ink drop breaking off around the nozzle 24. The ink drop then continues to travel toward the recording medium under its own momentum. The nozzle refills due to the surface tension of the ink at the nozzle tip 24. Shortly after the time of drop break off, a meniscus at the nozzle tip is formed with an approximately concave hemispherical surface. The surface tension will exert a net forward force on the ink which will result in nozzle refilling. The repetition rate of the nozzle 4 is therefore principally determined by the nozzle refill time which will be 100 microseconds, depending on the device geometry, ink surface tension and the volume of the ejected drop.
Turning now to FIG. 3, an important aspect of the operation of the electro-magnetically driven print nozzle will now be described. Upon a current flowing through the coil 11, the plate 15 becomes strongly attracted to the plate 13. The plate 15 experiences a downward force and begins movement towards the plate 13. This movement imparts a momentum to the ink within the nozzle chamber 17. The ink is subsequently ejected as hereinbefore described. Unfortunately, the movement of the plate 15 causes a build-up of pressure in the area 64 between the plate 15 and the coil 11. This build-up would normally result in a reduced effectiveness of the plate 15 in ejecting ink.
However, in a first design the plate 15 preferably includes a series of apertures eg. 20 which allow for the flow of ink from the area 64 back into the ink chamber and thereby allow a reduction in the pressure in area 64. This results in an increased effectiveness in the operation of the plate 15.
Preferably, the apertures 20 are of a teardrop shape increasing in width with increasing radial distance from a centre of the plunger. The aperture profile thereby provides minimal disturbance of the magnetic flux through the plunger while maintaining structural integrity of plunger 15.
After the plunger 15 has reached its end position, the current through coil 11 is reversed resulting in a repulsion of the two plates 13, 15. Additionally, the torsional spring eg. 23 acts to return the plate 15 to its initial position.
The use of a torsional spring eg. 23 has a number of substantial benefits including a compact layout. The construction of the torsional spring from the same material and same processing steps as that of the plate 15 simplifies the manufacturing process.
In an alternative design, the top surface of plate 15 does not include a series of apertures. Rather, the inner radial surface 25 (SEE FIG. 3) of plate 15 comprises slots of substantially constant cross-sectional profile in fluid communication between the nozzle chamber 17 and the area 64 between plate 15 and the solenoid 11. Upon activation of the coil 11, the plate 15 is attracted to the armature plate 13 and experiences a force directed towards plate 13. As a result of the movement, fluid in the area 64 is compressed and experiences a higher pressure than its surrounds. As a result, the flow of fluid takes place out of the slots in the inner radial surface 25 plate 15 into the nozzle chamber 17. The flow of fluid into chamber 17, in addition to the movement of the plate 15, causes the ejection of ink out of the ink nozzle port 24. Again, the movement of the plate 15 causes the torsional springs, for example 23, to be resiliently deformed. Upon completion of the movement of the plate 15, the coil 11 is deactivated and a slight reverse current is applied. The reverse current acts to repel the plate 15 from the armature plate 13. The torsional springs, for example 23, act as additional means to return the plate 15 to its initial or quiescent position.
Fabrication
Returning now to FIG. 1, the nozzle apparatus is constructed from the following main parts including a nozzle surface 40 having an aperture 24 which can be constructed from boron doped silicon 50. The radius of the aperture 24 of the nozzle is an important determinant of drop velocity and drop size.
Next, a CMOS silicon layer 42 is provided upon which is fabricated all the data storage and driving circuitry 41 necessary for the operation of the nozzle 4. In this layer a nozzle chamber 17 is also constructed. The nozzle chamber 17 should be wide enough so that viscous drag from the chamber walls does not significantly increase the force required of the plunger. It should also be deep enough so that any air ingested through the nozzle port 24 when the plunger returns to its quiescent state does not extend to the plunger device. If it does, the ingested bubble may form a cylindrical surface instead of a hemispherical surface resulting in the nozzle not refilling properly. A CMOS dielectric and insulating layer 44 containing various current paths for the current connection to the plunger device is also provided.
Next, a fixed plate of ferroelectric material is provided having two parts 13, 46. The two parts 13, 46 are electrically insulated from one another.
Next, a solenoid 11 is provided. This can comprise a spiral coil of deposited copper. Preferably a single spiral layer is utilised to avoid fabrication difficulty and copper is used for a low resistivity and high electro-migration resistance.
Next, a plunger 15 of ferromagnetic material is provided to maximise the magnetic force generated. The plunger 15 and fixed magnetic plate 13, 46 surround the solenoid 11 as a torus. Thus, little magnetic flux is lost and the flux is concentrated around the gap between the plunger 15 and the fixed plate 13, 46.
The gap between the fixed plate 13, 46 and the plunger 15 is one of the most important "parts" of the print nozzle 4. The size of the gap will strongly affect the magnetic force generated, and also limits the travel of the plunger 15. A small gap is desirable to achieve a strong magnetic force, but a large gap is desirable to allow longer plunger 15 travel, and therefore allow a smaller plunger radius to be utilised.
Next, the springs, e.g. 22, 23 for returning to the plunger 15 to its quiescent position after a drop has been ejected are provided. The springs, e.g. 22, 23 can be fabricated from the same material, and in the same processing steps, as the plunger 15. Preferably the springs, e.g. 22, 23 act as torsional springs in their interaction with the plunger 15.
Finally, all surfaces are coated with passivation layers, which may be silicon nitride (Si.sub.3 N.sub.4), diamond like carbon (DLC), or other chemically inert, highly impermeable layer. The passivation layers are especially important for device lifetime, as the active device will be immersed in the ink.
One form of detailed manufacturing process which can be used to fabricate monolithic ink jet print heads operating in accordance with the principles taught by the present embodiment can proceed utilizing the following steps:
1. Using a double sided polished wafer deposit 3 microns of epitaxial silicon heavily doped with boron 50.
2. Deposit 10 microns of epitaxial silicon 42, either p-type or n-type, depending upon the CMOS process used.
3. Complete a 0.5 micron, one poly, 2 metal CMOS process. This step is shown at 41 in FIG. 5.
For clarity, these diagrams may not be to scale, and may not represent a cross section though any single plane of the nozzle. FIG. 4 is a key to representations of various materials in these manufacturing diagrams, and those of other cross referenced ink jet configurations.
4. Etch the CMOS oxide layers 41 down to silicon or aluminum using Mask 1. This mask defines the nozzle chamber, the edges of the print heads chips, and the vias for the contacts from the aluminum electrodes to the two halves of the split fixed magnetic plate.
5. Plasma etch the silicon 42 down to the boron doped buried layer 50, using oxide from step 4 as a mask. This etch does not substantially etch the aluminum. This step is shown in FIG. 6.
6. Deposit a seed layer of cobalt nickel iron alloy. CoNiFe is chosen due to a high saturation flux density of 2 Tesla, and a low coercivity. [Osaka, Tetsuya et al, A soft magnetic CoNiFe film with high saturation magnetic flux density, Nature 392, 796-798 (1998)].
7. Spin on 4 microns of resist 51, expose with Mask 2, and develop. This mask defines the split fixed magnetic plate, for which the resist acts as an electroplating mold. This step is shown in FIG. 7.
8. Electroplate 3 microns of CoNiFe 52. This step is shown in FIG. 8.
9. Strip the resist 51 and etch the exposed seed layer. This step is shown in FIG. 9.
10. Deposit 0.1 microns of silicon nitride (Si.sub.3 N.sub.4).
11. Etch the nitride layer using Mask 3. This mask defines the contact vias from each end of the solenoid coil to the two halves of the split fixed magnetic plate.
12. Deposit a seed layer of copper. Copper is used for its low resistivity (which results in higher efficiency) and its high electromigration resistance, which increases reliability at high current densities.
13. Spin on 5 microns of resist 53, expose with Mask 4, and develop. This mask defines the solenoid spiral coil and the spring posts, for which the resist acts as an electroplating mold. This step is shown in FIG. 10.
14. Electroplate 4 microns of copper 54.
15. Strip the resist 53 and etch the exposed copper seed layer. This step is shown in FIG. 11.
16. Wafer probe. All electrical connections are complete at this point, bond pads are accessible, and the chips are not yet separated.
17. Deposit 0.1 microns of silicon nitride.
18. Deposit 1 micron of sacrificial material 56. This layer 56 determines the magnetic gap.
19. Etch the sacrificial material 56 using Mask 5. This mask defines the spring posts. This step is shown in FIG. 12.
20. Deposit a seed layer of CoNiFe.
21. Spin on 4.5 microns of resist 57, expose with Mask 6, and develop. This mask defines the walls of the magnetic plunger, plus the spring posts. The resist forms an electroplating mold for these parts. This step is shown in FIG. 13.
22. Electroplate 4 microns of CoNiFe 58. This step is shown in FIG. 14.
23. Deposit a seed layer of CoNiFe.
24. Spin on 4 microns of resist 59, expose with Mask 7, and develop. This mask defines the roof of the magnetic plunger, the springs, and the spring posts. The resist forms an electroplating mold for these parts. This step is shown in FIG. 15.
25. Electroplate 3 microns of CoNiFe 60. This step is shown in FIG. 16.
26. Mount the wafer on a glass blank 61 and back-etch the wafer using KOH, with no mask. This etch thins the wafer and stops at the buried boron doped silicon layer 50. This step is shown in FIG. 17.
27. Plasma back-etch the boron doped silicon layer 50 to a depth of (approx.) 1 micron using Mask 8. This mask defines the nozzle rim 62. This step is shown in FIG. 18.
28. Plasma back-etch through the boron doped layer using Mask 9. This mask defines the nozzle, and the edge of the chips. At this stage, the chips are separate, but are still mounted on the glass blank. This step is shown in FIG. 19.
29. Detach the chips from the glass blank. Strip all adhesive, resist, sacrificial, and exposed seed layers. This step is shown in FIG. 20.
30. Mount the printheads in their packaging, which may be a molded plastic former incorporating ink channels which supply different colors of ink to the appropriate regions of the front surface of the wafer.
31. Connect the print heads to their interconnect systems.
32. Hydrophobize the front surface of the printheads.
33. Fill the completed print heads with ink 63 and test them. A filled nozzle is shown in FIG. 21.
It would be appreciated by a person skilled in the art that numerous variations and/or modifications may be made to the present invention as shown in the specific embodiment without departing from the spirit or scope of the invention as broadly described. The present embodiment is, therefore, to be considered in all respects to be illustrative and not restrictive.
The presently disclosed ink jet printing technology is potentially suited to a wide range of printing systems including: color and monochrome office printers, short run digital printers, high speed digital printers, offset press supplemental printers, low cost scanning printers, high speed pagewidth printers, notebook computers with in-built pagewidth printers, portable color and monochrome printers, color and monochrome copiers, color and monochrome facsimile machines, combined printer, facsimile and copying machines, label printers, large format plotters, photograph copiers, printers for digital photographic `minilabs`, video printers, PHOTO CD (PHOTO CD is a registered trade mark of the Eastman Kodak Company) printers, portable printers for PDAs, wallpaper printers, indoor sign printers, billboard printers, fabric printers, camera printers and fault tolerant commercial printer arrays.
Ink Jet Technologies
The embodiments of the invention use an ink jet printer type device. Of course many different devices could be used. However presently popular ink jet printing technologies are unlikely to be suitable.
The most significant problem with thermal ink jet is power consumption. This is approximately 100 times that required for high speed, and stems from the energy-inefficient means of drop ejection. This involves the rapid boiling of water to produce a vapor bubble which expels the ink. Water has a very high heat capacity, and must be superheated in thermal ink jet applications. This leads to an efficiency of around 0.02%, from electricity input to drop momentum (and increased surface area) out.
The most significant problem with piezoelectric ink jet is size and cost. Piezoelectric crystals have a very small deflection at reasonable drive voltages, and therefore require a large area for each nozzle. Also, each piezoelectric actuator must be connected to its drive circuit on a separate substrate. This is not a significant problem at the current limit of around 300 nozzles per printhead, but is a major impediment to the fabrication of pagewidth printheads with 19,200 nozzles.
Ideally, the ink jet technologies used meet the stringent requirements of in-camera digital color printing and other high quality, high speed, low cost printing applications. To meet the requirements of digital photography, new ink jet technologies have been created. The target features include:
low power (less than 10 Watts)
high resolution capability (1,600 dpi or more)
photographic quality output
low manufacturing cost
small size (pagewidth times minimum cross section)
high speed (<2 seconds per page).
All of these features can be met or exceeded by the ink jet systems described below with differing levels of difficulty. Forty-five different ink jet technologies have been developed by the Assignee to give a wide range of choices for high volume manufacture. These technologies form part of separate applications assigned to the present Assignee as set out in the table under the heading Cross References to Related Applications.
The ink jet designs shown here are suitable for a wide range of digital printing systems, from battery powered one-time use digital cameras, through to desktop and network printers, and through to commercial printing systems.
For ease of manufacture using standard process equipment, the printhead is designed to be a monolithic 0.5 micron CMOS chip with MEMS post processing. For color photographic applications, the printhead is 100 mm long, with a width which depends upon the ink jet type. The smallest printhead designed is IJ38, which is 0.35 mm wide, giving a chip area of 35 square mm. The printheads each contain 19,200 nozzles plus data and control circuitry.
Ink is supplied to the back of the printhead by injection molded plastic ink channels. The molding requires 50 micron features, which can be created using a lithographically micromachined insert in a standard injection molding tool. Ink flows through holes etched through the wafer to the nozzle chambers fabricated on the front surface of the wafer. The printhead is connected to the camera circuitry by tape automated bonding.
Tables of Drop-on-Demand Ink Jets
The present invention is useful in the field of digital printing, in particular, ink jet printing.
Eleven important characteristics of the fundamental operation of individual ink jet nozzles have been identified. These characteristics are largely orthogonal, and so can be elucidated as an eleven dimensional matrix. Most of the eleven axes of this matrix include entries developed by the present assignee.
The following tables form the axes of an eleven dimensional table of ink jet types.
Actuator mechanism (18 types)
Basic operation mode (7 types)
Auxiliary mechanism (8 types)
Actuator amplification or modification method (17 types)
Actuator motion (19 types)
Nozzle refill method (4 types)
Method of restricting back-flow through inlet (10 types)
Nozzle clearing method (9 types)
Nozzle plate construction (9 types)
Drop ejection direction (5 types)
Ink type (7 types)
The complete eleven dimensional table represented by these axes contains 36.9 billion possible configurations of ink jet nozzle. While not all of the possible combinations result in a viable ink jet technology, many million configurations are viable. It is clearly impractical to elucidate all of the possible configurations. Instead, certain ink jet types have been investigated in detail. These are designated IJ01 to IJ145 which matches the docket numbers in the table under the heading Cross References to Related Applications.
Other ink jet configurations can readily be derived from these forty-five examples by substituting alternative configurations along one or more of the 11 axes. Most of the IJ01 to IJ45 examples can be made into ink jet printheads with characteristics superior to any currently available ink jet technology.
Where there are prior art examples known to the inventor, one or more of these examples are listed in the examples column of the tables below. The IJ01 to IJ45 series are also listed in the examples column. In some cases, a print technology may be listed more than once in a table, where it shares characteristics with more than one entry.
Suitable applications for the ink jet technologies include: Home printers, Office network printers, Short run digital printers, Commercial print systems, Fabric printers, Pocket printers, Internet WWW printers, Video printers, Medical imaging, Wide format printers, Notebook PC printers, Fax machines, Industrial printing systems, Photocopiers, Photographic minilabs etc.
The information associated with the aforementioned 11 dimensional matrix are set out in the following tables.
CROSS-
REFERENCED U.S. Pat. application
AUSTRALIAN (CLAIMING RIGHT OF PRIORITY
PROVISIONAL FROM AUSTRALIAN
Pat. No. PROVISIONAL APPLICATION) DOCKET No.
PO7991 09/113,060 ART01
PO8505 09/113,070 ART02
PO7988 09/113,073 ART03
PO9395 09/112,748 ART04
PO8017 09/112,747 ART06
PO8014 09/112,776 ART07
PO8025 09/112,750 ART08
PO8032 09/112,746 ART09
PO7999 09/112,743 ART10
PO7998 09/112,742 ART11
PO8031 09/112,741 ART12
PO8030 09/112,740 ART13
PO7997 09/112,739 ART15
PO7979 09/113,053 ART16
PO8015 09/112,738 ART17
PO7978 09/113,067 ART18
PO7982 09/113,063 ART19
PO7989 09/113,069 ART20
PO8019 09/112,744 ART21
PO7980 09/113,058 ART22
PO8018 09/112,777 ART24
PO7938 09/113,224 ART25
PO8016 09/112,804 ART26
PO8024 09/112,805 ART27
PO7940 09/113,072 ART28
PO7939 09/112,785 ART29
PO8501 09/112,797 ART30
PO8500 09/112,796 ART31
PO7987 09/113,071 ART32
PO8022 09/112,824 ART33
PO8497 09/113,090 ART34
PO8020 09/112,823 ART38
PO8023 09/113,222 ART39
PO8504 09/112,786 ART42
PO8000 09/113,051 ART43
PO7977 09/112,782 ART44
PO7934 09/113,056 ART45
PO7990 09/113,059 ART46
PO8499 09/113,091 ART47
PO8502 09/112,753 ART48
PO7981 09/113,055 ART50
PO7986 09/113,057 ART51
PO7983 09/113,054 ART52
PO8026 09/112,752 ART53
PO8027 09/112,759 ART54
PO8028 09/112,757 ART56
PO9394 09/112,758 ART57
PO9396 09/113,107 ART58
PO9397 09/112,829 ART59
PO9398 09/112,792 ART60
PO9399 09/112,791 ART61
PO9400 09/112,790 ART62
PO9401 09/112,789 ART63
PO9402 09/112,788 ART64
PO9403 09/112,795 ART65
PO9405 09/112,749 ART66
PP0959 09/112,784 ART68
PP1397 09/112,783 ART69
PP2370 09/112,781 DOT01
PP2371 09/113,052 DOT02
PO8003 09/112,834 Fluid01
PO8005 09/113,103 Fluid02
PO9404 09/113,101 Fluid03
PO8066 09/112,751 IJ01
PO8072 09/112,787 IJ02
PO8040 09/112,802 IJ03
PO8071 09/112,803 I304
PO8047 09/113,097 I305
PO8035 09/113,099 I306
PO8044 09/113,084 IJ07
PO8063 09/113,066 IJ08
PO8057 09/112,778 IJ09
PO8056 09/112,779 IJ10
PO8069 09/113,077 IJ11
PO8049 09/113,061 IJ12
PO8036 09/112,818 IJ13
PO8048 09/112,816 IJ14
PO8070 09/112,772 IJ15
PO8067 09/112,819 IJ16
PO8001 09/112,815 IJ17
PO8038 09/113,096 IJ18
PO8033 09/113,068 IJ19
PO8002 09/113,095 IJ20
PO8068 09/112,808 IJ21
PO8062 09/112,809 IJ22
PO8034 09/112,780 IJ23
PO8039 09/113,083 IJ24
PO8041 09/113,121 IJ25
PO8004 09/113,122 IJ26
PO8037 09/112,793 IJ27
PO8043 09/112,794 IJ28
PO8042 09/113,128 IJ29
PO8064 09/113,127 IJ30
PO9389 09/112,756 IJ31
PO9391 09/112,755 IJ32
PP0888 09/112,754 IJ33
PP0891 09/112,811 IJ34
PP0890 09/112,812 IJ35
PP0873 09/112,813 IJ36
PP0993 09/112,814 IJ37
PP0890 09/112,764 IJ38
PP1398 09/112,765 IJ39
PP2592 09/112,767 IJ40
PP2593 09/112,768 IJ41
PP3991 09/112,807 IJ42
PP3987 09/112,806 IJ43
PP3985 09/112,820 IJ44
PP3983 09/112,821 IJ45
PO7935 09/112,822 IJM01
PO7936 09/112,825 IJM02
PO7937 09/112,826 IJM03
PO8061 09/112,827 IJM04
PO8054 09/112,828 IJM05
PO8065 09/113,111 IJM06
PO8055 09/113,108 IJM07
PO8053 09/113,109 IJM08
PO8078 09/113,123 IJM09
PO7933 09/113,114 IJM10
PO7950 09/113,115 IJM11
PO7949 09/113,129 IJM12
PO8060 09/113,124 IJM13
PO8059 09/113,125 IJM14
PO8073 09/113,126 IJM15
PO8076 09/113,119 IJM16
PO8075 09/113,120 IJM17
PO8079 09/113,221 IJM18
PO8050 09/113,116 IJM19
PO8052 09/113,118 IJM20
PO7948 09/113,117 IJM21
PO7951 09/113,113 IJM22
PO8074 09/113,130 IJM23
PO7941 09/113,110 IJM24
PO8077 09/113,112 IJM25
PO8058 09/113,087 IJM26
PO8051 09/113,074 IJM27
PO8045 09/113,089 IJM28
PO7952 09/113,088 IJM29
PO8046 09/112,771 IJM30
PO9390 09/112,769 IJM31
PO9392 09/112,770 IJM32
PP0889 09/112,798 IJM35
PP0887 09/112,801 IJM36
PP0882 09/112,800 IJM37
PP0874 09/112,799 IJM38
PP1396 09/113,098 IJM39
PP3989 09/112,833 IJM40
PP2591 09/112,832 IJM41
PP3990 09/112,831 IJM42
PP3986 09/112,830 IJM43
PP3984 09/112,836 IJM44
PP3982 09/112,835 IJM45
PP0895 09/113,102 IR01
PP0870 09/113,106 IR02
PP0869 09/113,105 IR04
PP0887 09/113,104 IR05
PP0885 09/112,810 IR06
PP0884 09/112,766 IR10
PP0886 09/113,085 IR12
PP0871 09/113,086 IR13
PP0876 09/113,094 IR14
PP0877 09/112,760 IR16
PP0878 09/112,773 IR17
PP0879 09/112,774 IR18
PP0883 09/112,775 IR19
PP0880 09/112,745 IR20
PP0881 09/113,092 IR21
PO8006 09/113,100 MEMS02
PO8007 09/113,093 MEMS03
PO8008 09/113,062 MEMS04
PO8010 09/113,064 MEMS05
PO8011 09/113,082 MEMS06
PO7947 09/113,081 MEMS07
PO7944 09/113,080 MEMS09
PO7946 09/113,079 MEMS10
PO9393 09/113,065 MEMS11
PP0875 09/113,078 MEMS12
PP0894 09/113,075 MEMS13
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